Numerical simulation of plasma immersion ion implantation for cubic target with finite length using three-dimensional particle-in-cell model
Acta Physica Sinica
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Acta Phys. Sin.  2011, Vol. 60 Issue (8): 085206     doi:10.7498/aps.60.085206
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Numerical simulation of plasma immersion ion implantation for cubic target with finite length using three-dimensional particle-in-cell model
Wang Peng, Tian Xiu-Bo, Wang Zhi-Jian, Gong Chun-Zhi, Yang Shi-Qin
State Key Laboratory of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001, China
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