The variations in composition and bonding configuration of SiN<sub><i>x</i></sub> film under high annealing temperature treatment [an error occurred while processing this directive]
Acta Physica Sinica
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Acta Phys. Sin.  2012, Vol. 61 Issue (1): 016803    
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search [an error occurred while processing this directive] | [an error occurred while processing this directive] 
The variations in composition and bonding configuration of SiNx film under high annealing temperature treatment
Jiang Li-Hua, Zeng Xiang-Bin, Zhang Xiao
Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China
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