MONTE CARLO CALCULATION ON THE MEASUREMENT OF THICKNESS OF THIN FILMS IN MICRO-DOMAIN
Acta Physica Sinica
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Acta Phys. Sin.  1982, Vol. 31 Issue (1): 115-120    
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MONTE CARLO CALCULATION ON THE MEASUREMENT OF THICKNESS OF THIN FILMS IN MICRO-DOMAIN
HE YAN-CAI1, HUANG YUE-HONG1, SUN JING1, CHEN YU-SAN2
(1)中国科学院上海硅酸盐研究所; (2)中国科学院上海冶金研究所
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