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DYNAMIC ABERRATION CORRECTION IN A COMBINED SCANNING ELECTRON BEAM SYSTEM

XIMEN JI-YE LI YU

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DYNAMIC ABERRATION CORRECTION IN A COMBINED SCANNING ELECTRON BEAM SYSTEM

XIMEN JI-YE, LI YU
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  • Based on the results of the previous paper [1], the dynamic aberration correetion in a combined scanning electron beam system is studied. The possibility of dynamic aberration correction by using electro-magnetic multipole fields is discussed. The formulas for calculating aberrations, caused by round and multipole correctors, are derived.Thus we show that in a combined scanning electron beam system most of the third order deflection aberrations may be eliminated by properly using a dynamic aberration correction system, consisting of round lens, deflector and quadrupole devices.
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  • Abstract views:  6142
  • PDF Downloads:  556
  • Cited By: 0
Publishing process
  • Received Date:  20 January 1982
  • Published Online:  05 June 1982

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