STRESS STUDIES OF AMORPHOUS a-Si:H/a-SiN<sub>x</sub>:H HETEROJUNCTIONS AND a-Si:H, a-SiN<sub>x</sub>:H FILMS
Acta Physica Sinica
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Acta Phys. Sin.  1987, Vol. 36 Issue (12): 1529-1537    
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STRESS STUDIES OF AMORPHOUS a-Si:H/a-SiNx:H HETEROJUNCTIONS AND a-Si:H, a-SiNx:H FILMS
WANG WAN-LU, LIAO KE-JUN
兰州大学物理系
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