STUDY OF THE DEFECTS IN OXYGEN PLASMA IRRADIATED n/n<sup>+</sup> Si
Acta Physica Sinica
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Acta Phys. Sin.  1987, Vol. 36 Issue (5): 646-650    
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STUDY OF THE DEFECTS IN OXYGEN PLASMA IRRADIATED n/n+ Si
WANG FANG-PING, XU JIAN-GUO, SUN HENG-HUI
复旦大学物理系
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