STUDY ON THE BREAKDOWN MECHANISM OF A THIN Si<sub>x</sub>O<sub>y</sub>N<sub>z</sub> FILM
Acta Physica Sinica
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Acta Phys. Sin.  1989, Vol. 38 Issue (1): 68-75    
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STUDY ON THE BREAKDOWN MECHANISM OF A THIN SixOyNz FILM
CHEN DOU-NAN, LIU BAI-YONG, ZHENG XUE-REN
华南理工大学物理系
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