Photoluminescence (PL) spectra of annealed a-SixC1-x:H films were studied. The-widths of the exponential bandtails were determined by means of the temperature dependences of PL peak energy positions. The experimental results shows that PL peak energy positions shift towards the lower energy with annealing temperature increasing. The bandtail widths have been calculated according to the exponential bandtail model, the calculation shows that the bandtails contract with increase of annealing temperature. A discussion about the results has been given.
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