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SUPPRESSION AND ELIMINATION OF SECONDARY DEFECTS IN SILICON IMPLANTED WITH MeV ENERGETIC B+ IONS

LU WU-XING QIAN YA-HONG TIAN REN-HE WANG ZHONG-LIE

Citation:

SUPPRESSION AND ELIMINATION OF SECONDARY DEFECTS IN SILICON IMPLANTED WITH MeV ENERGETIC B+ IONS

LU WU-XING, QIAN YA-HONG, TIAN REN-HE, WANG ZHONG-LIE
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  • Abstract views:  6472
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Publishing process
  • Received Date:  07 March 1989
  • Published Online:  05 January 1990

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