Surface crystallization of amorphous fused silica during electron cyclotron resonance plasma etching
Acta Physica Sinica
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Acta Phys. Sin  2012, Vol. 61 Issue (2): 024206     doi:10.7498/aps.61.024206
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Surface crystallization of amorphous fused silica during electron cyclotron resonance plasma etching
Wang Feng1 2, Wu Wei-Dong1, Jiang Xiao-Dong1, Tang Yong-Jian1
1. Centre of Laser Fusion Research of CAEP, Mianyang 621900, China;
2. School of Science, Chongqing Jiaotong University, Chongqing 400074, China
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