Application of floating microwave resonator probe to the measurement of electron density in electronegative capacitively coupled plasma
Acta Physica Sinica
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Acta Phys. Sin  2012, Vol. 61 Issue (7): 075204     doi:10.7498/aps.61.075204
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Application of floating microwave resonator probe to the measurement of electron density in electronegative capacitively coupled plasma
Zou Shuai,Tang Zhong-Hua,Ji Liang-Liang,Su Xiao-Dong,Xin Yu
Provincial Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006, China
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