The characterization of hydrogenated amorphous silicon and epitaxial silicon thin films grown on crystalline silicon substrates by using spectroscopic ellipsometry
Acta Physica Sinica
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Acta Phys. Sin  2012, Vol. 61 Issue (15): 157803     doi:10.7498/aps.61.157803
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Current Issue| Archive| Adv Search  |   
The characterization of hydrogenated amorphous silicon and epitaxial silicon thin films grown on crystalline silicon substrates by using spectroscopic ellipsometry
Wu Chen-Yang, Gu Jin-Hua, Feng Ya-Yang, Xue Yuan, Lu Jing-Xiao
Key Laboratory of Materials Physics of Ministry of Education, School of Physical Engineering, Zhengzhou University, Zhengzhou 450052, China
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