Mode transition of inductively coupled plasma in interlayer chamber
Acta Physica Sinica
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Acta Phys. Sin  2012, Vol. 61 Issue (19): 195206     doi:10.7498/aps.61.195206
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Mode transition of inductively coupled plasma in interlayer chamber
Du Yin-Chang1, Cao Jin-Xiang1, Wang Jian1, Zheng Zhe1, Liu Yu1, Meng Guang2, Ren Ai-Min2, Zhang Sheng-Jun2
1. Key Laboratory of Basic Plasma Physics Chinese Academy of Sciences, University of Science and Technology of China Department of Modern Physics, Hefei 230026, China;
2. Test Physics and Numerical Mathematic Laboratory, Beijing 100076, China
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