Numerical simulation of enhanced glow discharge plasma immersion ion implantation using three-dimensional PIC/MC model
Acta Physica Sinica
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Acta Phys. Sin.  2012, Vol. 61 Issue (22): 225203     doi:10.7498/aps.61.225203
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Numerical simulation of enhanced glow discharge plasma immersion ion implantation using three-dimensional PIC/MC model
He Fu-Shun, Li Liu-He, Li Fen, Dun Dan-Dan, Tao Chan-Cai
School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China
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