Diffraction efficiency measurement of large aperture multilayer dielectric grating and its application in the fabrication process
Acta Physica Sinica
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Acta Phys. Sin  2012, Vol. 61 Issue (17): 174203     doi:10.7498/aps.61.174203
ELECTROMAGENTISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS Current Issue| Archive| Adv Search  |   
Diffraction efficiency measurement of large aperture multilayer dielectric grating and its application in the fabrication process
Zhou Xiao-Wei, Liu Ying, Xu Xiang-Dong, Qiu Ke-Qiang, Liu Zhen-Kun, Hong Yi-Ling, Fu Shao-Jun
National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
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