Radial density uniformity of dual frequency capacitively coupled plasma
Acta Physica Sinica
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Acta Phys. Sin  2012, Vol. 61 Issue (1): 015204     doi:10.7498/aps.61.015204
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Radial density uniformity of dual frequency capacitively coupled plasma
Jiang Xiang-Zhan1 2, Liu Yong-Xin1, Bi Zhen-Hua1, Lu Wen-Qi1, Wang You-Nian1
1. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China;
2. Xinjiang Ploytechnical College, Urumqi 830091, China
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