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A STUDY ON DISSOCIATION KINETICS OF SiH4+CH4 PLASMA INDUCED BY PULSED INFRARED LASER

YU WEI LI XIAO-WEI HAN LI ZHANG LIAN-SHUI FU GUANG-SHENG

Citation:

A STUDY ON DISSOCIATION KINETICS OF SiH4+CH4 PLASMA INDUCED BY PULSED INFRARED LASER

YU WEI, LI XIAO-WEI, HAN LI, ZHANG LIAN-SHUI, FU GUANG-SHENG
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  • Abstract views:  5987
  • PDF Downloads:  729
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Publishing process
  • Received Date:  27 September 1993
  • Accepted Date:  19 November 1993
  • Published Online:  20 November 1994

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