A three-dimensional surface evolution algorithm based on cellular model for etching process
Acta Physica Sinica
Citation Search Quick Search
Acta Phys. Sin  2013, Vol. 62 Issue (10): 108201     doi:10.7498/aps.62.108201
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Current Issue| Archive| Adv Search  |   
A three-dimensional surface evolution algorithm based on cellular model for etching process
Zheng Shu-Lin, Song Yi-Xu, Sun Xiao-Min
Department of Computer Science and Technology, Tsinghua University, State Key Laboratory of Intelligent Technology and Systems, Beijing 100084, China
Copyright © Acta Physica Sinica
Address: Institute of Physics, Chinese Academy of Sciences, P. O. Box 603,Beijing 100190 China
Tel: 010-82649294,82649829,82649863   E-mail: aps8@iphy.ac.cn