Improving the mobility of the amorphous silicon TFT with the new stratified structure by PECVD
Acta Physica Sinica
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Acta Phys. Sin  2013, Vol. 62 Issue (13): 138501     doi:10.7498/aps.62.138501
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Improving the mobility of the amorphous silicon TFT with the new stratified structure by PECVD
Yu Yao1, Zhang Jing-Si2, Chen Dai-Dai1, Guo Rui-Qian1, Gu Zhi-Hua1
1. Flat Panel Display Center of Laboratory of Advanced Materials, Fudan University, Shanghai 200433, China;
2. CATIC display company, Shanghai 201100, China
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