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Investigation on the relationship between the properties of atomic layer deposition ZnO film and the dose of precursor

Dong Ya-Bin Xia Yang Li Chao-Bo Lu Wei-Er Rao Zhi-Peng Zhang Yang Zhang Xiang Ye Tian-Chun

Citation:

Investigation on the relationship between the properties of atomic layer deposition ZnO film and the dose of precursor

Dong Ya-Bin, Xia Yang, Li Chao-Bo, Lu Wei-Er, Rao Zhi-Peng, Zhang Yang, Zhang Xiang, Ye Tian-Chun
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  • Abstract views:  5666
  • PDF Downloads:  785
  • Cited By: 0
Publishing process
  • Received Date:  24 January 2013
  • Accepted Date:  01 April 2013
  • Published Online:  05 July 2013

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