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A novel method based on machine vision is proposed for measuring the effective d31 coefficient. Based on the best estimation of gray scale of interference pattern, the sensitivity of the twin-beam interferometry is significantly improved in comparison with previously reported system. Firstly, the interference pattern grabbed by machine vision system is extracted using the algorithm developed in this work. Secondly, using gray-scale pattern with 256 gray-levels the measurement accuracy of the interferometric optical path difference of the interferometer can reach 1/1024 of the wavelength of the laser theoretically. So the experimental results of a PZT pipe in the method are greatly accurate.
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Keywords:
- machine vision /
- inverse piezoelectric coefficient /
- double-beam interferometry /
- digital image processing
[1] Jae Lee H, Zhang S, Meyer R J, Sherlock N P, Shrout T R 2012 Appl. Phys. Lett. 101 032902
[2] Dekkers M, Boschker H, van Zalk M, Nguyen M, Nazeer H, Houwman E, Rijnders G 2013 J. Micromech. Microengin. 23 025008
[3] Chen D R, Li G R, Yin Q R 1997 J. Inorganic Mater. 12 861 (in Chinese) [陈大任, 李国荣, 殷庆瑞 1997 无机材料学报 12 861]
[4] Wu X M, Chen J B, Zhu R H, Cheng L J, Wang Q, Zhu Q S 2002 Infr. Laser Engin. 31 257 (in Chinese) [吴新民, 陈进榜, 朱日宏, 程丽君, 王青, 朱应时 2002 红外与激光工程 31 257]
[5] Ji C, Zhang L Y, Dou S X, Wang P Y 2011 Acta Phys. Sin. 60 098703 (in Chinese) [季超, 张凌云, 窦硕星, 王鹏业 2011 物理学报 60 098703]
[6] Fan W X, Zhang M, Wang X M 2004 J. Xi’an Univ. Engin. Sci. Technol. 18 160 (in Chinese) [樊文侠, 张敏, 王新明 2004 西安工程科技学院学报 18 160]
[7] Yan Z G, Lin Y L, Yang J, Li Z H, Bian B M 2012 Acta Phys. Sin. 61 200502 (in Chinese) [闫振纲, 林颖璐, 杨娟, 李振华, 卞保民 2012 物理学报 61 200502]
[8] Lin Y L, Yan Z G, Yang J, Wang C Y, Bian B M 2012 Acta Phys. Sin. 61 100505 (in Chinese) [林颖璐, 闫振纲, 杨娟, 王春勇, 卞保民 2012 物理学报 61 100505]
[9] Mesarović V Z, Galatsanos N P, Wernick M N 2000 JOSA A 17 711
[10] Ni Y C 2009 Shiyong Celiang Buquedingdu Pingding (Beijing: China Metrology Publishing House) p107 (in Chinese) [倪育才 2009 实用测量不确定度评定 (北京: 中国计量出版社) 第107页]
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[1] Jae Lee H, Zhang S, Meyer R J, Sherlock N P, Shrout T R 2012 Appl. Phys. Lett. 101 032902
[2] Dekkers M, Boschker H, van Zalk M, Nguyen M, Nazeer H, Houwman E, Rijnders G 2013 J. Micromech. Microengin. 23 025008
[3] Chen D R, Li G R, Yin Q R 1997 J. Inorganic Mater. 12 861 (in Chinese) [陈大任, 李国荣, 殷庆瑞 1997 无机材料学报 12 861]
[4] Wu X M, Chen J B, Zhu R H, Cheng L J, Wang Q, Zhu Q S 2002 Infr. Laser Engin. 31 257 (in Chinese) [吴新民, 陈进榜, 朱日宏, 程丽君, 王青, 朱应时 2002 红外与激光工程 31 257]
[5] Ji C, Zhang L Y, Dou S X, Wang P Y 2011 Acta Phys. Sin. 60 098703 (in Chinese) [季超, 张凌云, 窦硕星, 王鹏业 2011 物理学报 60 098703]
[6] Fan W X, Zhang M, Wang X M 2004 J. Xi’an Univ. Engin. Sci. Technol. 18 160 (in Chinese) [樊文侠, 张敏, 王新明 2004 西安工程科技学院学报 18 160]
[7] Yan Z G, Lin Y L, Yang J, Li Z H, Bian B M 2012 Acta Phys. Sin. 61 200502 (in Chinese) [闫振纲, 林颖璐, 杨娟, 李振华, 卞保民 2012 物理学报 61 200502]
[8] Lin Y L, Yan Z G, Yang J, Wang C Y, Bian B M 2012 Acta Phys. Sin. 61 100505 (in Chinese) [林颖璐, 闫振纲, 杨娟, 王春勇, 卞保民 2012 物理学报 61 100505]
[9] Mesarović V Z, Galatsanos N P, Wernick M N 2000 JOSA A 17 711
[10] Ni Y C 2009 Shiyong Celiang Buquedingdu Pingding (Beijing: China Metrology Publishing House) p107 (in Chinese) [倪育才 2009 实用测量不确定度评定 (北京: 中国计量出版社) 第107页]
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