Study on atomic layer deposition preparation of core-shell structured nanometer materials
Acta Physica Sinica
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Acta Phys. Sin  2013, Vol. 62 Issue (19): 198102     doi:10.7498/aps.62.198102
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Study on atomic layer deposition preparation of core-shell structured nanometer materials
Li Yong1 2, Li Hui-Qi1, Xia Yang2, Liu Bang-Wu2
1. Shandong University of Science and Technology, Shandong 266590, China;
2. Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
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