Preparation of W-doped VO2/FTO composite thin films by DC magnetron sputtering and characterization analyses of the films

Tong Guo-Xiang; Li Yi; Wang Feng; Huang Yi-Ze; Fang Bao-Ying; Wang Xiao-Hua; Zhu Hui-Qun; Liang Qian; Yan Meng; Qin Yuan; Ding Jie; Chen Shao-Juan; Chen Jian-Kun; Zheng Hong-Zhu; Yuan Wen-Rui

doi:10.7498/aps.62.208102

Abstract

In order to obtain low phase transition temperature and superior thermochromic optical material, W-doped VO2/FTO composite thin films are prepared by depositing metallic vanadium on FTO (F:SnO2) conductive glass substrate in argon atmosphere at room temperature and then annealed in air ambient. XPS, XRD and SEM are used for analyzing the structures and surface morphologies of the films. The results indicate that no mixed oxides of V, W and F are produced during high-temperature thermal oxidation. W is doped by replacing V atoms. Compared with the pure VO2/FTO composite thin film prepared using the same process, the crystal orientation of W-doped VO2 thin film is not changed and still retains preferred crystal orientation in the (110) direction. The phase transition temperature drops down to about 35 ℃, and the thermal hysteresis loop narrows to 4 ℃. The variation of IR transmittance between the high temperature and the low temperature reaches 28%. SEM results show that the crystallinity of the thin film is improved significantly, showing smooth, compact and uniform surface morphology. This brings about many new opportunities for optoelectronic devices and industrial production.

Keywords:

Authors and contacts

1.
School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China;
2.
Shanghai Key Laboratory of Modern Optical Systems, Shanghai 200093, China;
3.
Department of Computer and Information Engineering, Shanghai University of Electric Power, Shanghai 200090, China
Funds: Project supported by the National High Technology Research and Development Program of China (Grant No. 2006AA03Z348), the Foundation for Key Program of Ministry of Education China (Grant No. 207033), the Key Science and Technology Research Project of Shanghai Committee, China (Grant No. 10ZZ94), the Shanghai Leading Academic Discipline Project, China (Grant No. S30502), the Innovation Program of Shanghai Municipal Education Commission, China (Grant No.12YZ094), the Shanghai Talent Leading Plan, China, and the State Key Laboratory of Advanced Optical Communication Systems and Networks, China.

References

[1]	Morin F J 1959 Phys. Rev. Lett. 3 34
[2]	Lu S W, Hou L S, Gan F X 1999 Thin Solid Films 353 40
[3]	Burkhardt W, Christmann T, Meyer B K, Niessner W, Schalch D, Scharmann A 1999 Thin Solid Films 345 229
[4]	Gherida M, Vincent H, Marezio M, Launay J L 1977 J. Solid State Chem. 22 423
[5]	Villeneuve G, Bordet A, Casalot A, Hagenmuller P 1971 Mater. Res. Bull. 6 119
[6]	Wang X J, Liu Y Y, Li D H, Feng B H, He Z W, Qi Z 2013 Chin. Phys. B 22 066803
[7]	Burkhardt W, Christmann T, Franke S, Kriegseis W, Merster D, Meyer B K, Niessner W, Schalch D, Scharmann A 2002 Thin Solid Films 402 226
[8]	Soltani M, Chaker M, Haddad E, Kruzelecky RV, Margot J 2004 Appl. Phys. Lett. 85 1958
[9]	Guinneton F, Sauques L, Valmalette J C, Cros F, Gavarri J R 2004 Thin Solid Films 446 287
[10]	Li J H, Yuan N Y, Xie T B, Dan D D 2007 Acta Phys. Sin. 56 1794 (in Chinese) [李金华, 袁宁一, 谢太斌, 但迪迪 2007 物理学报 56 1794]
[11]	Soltani M, Chaker M 2004 J. Vac. Sci. Technol. A 22 859
[12]	Zhou S, Li Y, Zhu H Q, Sun R X, Zhang Y M, Huang Y Z, Li L, Shen Y J, Zhen Q X, Tong G X, Fang B Y 2012 Surf. Coat. Technol. 206 2922.
[13]	Suzuki H, Yamaguchi K, Miyazaki H 2007 Compos. Sci. Technol. 67 1617
[14]	Saitzek S, Guinneton F, Sauques L, Aguir K, Gavarri J R 2007 Opt. Mater. 30 407
[15]	Xu G, Jin P, Tazawa M, Yoshimura K 2004 Sol. Energy Mater. Sol. Cells 83 29
[16]	Brook L A, Evans P, Foster H A, Pemble M E, Steele A, Sheel D W, Yates H M 2007 J. Photochem. Photobiol. A: Chemistry 187 53
[17]	Duchene J, Terraillon M, Pailly P, Adam G 1971 Appl. Phys. Lett. 19 115
[18]	Fisher B 1975 J. Phys. C 8 2072
[19]	Chae B G, Kim H T, Youn D H, Kang K Y 2005 Physica B 369 76
[20]	Ruzmetov D, Gopalakrishnan G, Deng J, Narayanamurti V, Ramanathan S 2010 J. Appl. Phys. 107 094305
[21]	Okimura K, Ezreena N, Sasakawa Y, Sakai J 2009 Jpn. J. Appl. Phys. 48 065003
[22]	Stefanovich G, Pergament A, Stefanovich D 2000 J. Phys.: Condens. Matter 12 8837
[23]	Kim H T, Chae B G, Youn D H, Kim G, Kang K Y, Lee S J, Kim K, Lim Y S 2005 Appl. Phys. Lett. 86 242101
[24]	Ruzmetov D, Gopalakrishnan G, Deng J D, Narayanamurti V, Ramanathan S 2009 J. Appl. Phys. 106 083702
[25]	Yang Z, Ko C, Ramanathan S 2010 J. Appl. Phys. 108 073708
[26]	Lee M J, Park Y, Suh D S, Lee E H, Seo S, Kim D C, Jung R, Kang B S, Ahn S E, Lee C B, Seo D H, Cha Y K, Yoo I K, Kim J S, Park B H 2007 Adv. Mater. 19 3919
[27]	Yang T H, Jin C M, Zhou H H, Narayan R J, Narayan J 2010 Appl. Phys. Lett. 97 702101
[28]	Heinilehto S T, Lappalainen J H, Jantunen H M, Lantto V 2011 J. Electroceram 27 7
[29]	Zhu H Q, Li Y, Zhou S, Huang Y Z, Tong G X, Sun R X, Zhang Y M, Zheng Q X, Li L, Shen Y J, Fang B Y 2011 Acta Phys. Sin. 60 098104 (in Chinese) [朱慧群, 李毅, 周晟, 黄毅泽, 佟国香, 孙若曦, 张宇明, 郑秋心, 李榴, 沈雨剪, 方宝英 2011 物理学报 60 098104]
[30]	Bowman R M, Gregg J M 1998 J. Mater. Sci: Mater. Electron. 9 187
[31]	Atrei A, Bardi U, Tarducci C, Rovida G 2000 J. Phys. Chem. B 104 3121
[32]	Continenza A, Massidda S, Posternak M 1999 Phys. Rev. B 60 15699

Cited By

[1]	Morin F J 1959 Phys. Rev. Lett. 3 34
[2]	Lu S W, Hou L S, Gan F X 1999 Thin Solid Films 353 40
[3]	Burkhardt W, Christmann T, Meyer B K, Niessner W, Schalch D, Scharmann A 1999 Thin Solid Films 345 229
[4]	Gherida M, Vincent H, Marezio M, Launay J L 1977 J. Solid State Chem. 22 423
[5]	Villeneuve G, Bordet A, Casalot A, Hagenmuller P 1971 Mater. Res. Bull. 6 119
[6]	Wang X J, Liu Y Y, Li D H, Feng B H, He Z W, Qi Z 2013 Chin. Phys. B 22 066803
[7]	Burkhardt W, Christmann T, Franke S, Kriegseis W, Merster D, Meyer B K, Niessner W, Schalch D, Scharmann A 2002 Thin Solid Films 402 226
[8]	Soltani M, Chaker M, Haddad E, Kruzelecky RV, Margot J 2004 Appl. Phys. Lett. 85 1958
[9]	Guinneton F, Sauques L, Valmalette J C, Cros F, Gavarri J R 2004 Thin Solid Films 446 287
[10]	Li J H, Yuan N Y, Xie T B, Dan D D 2007 Acta Phys. Sin. 56 1794 (in Chinese) [李金华, 袁宁一, 谢太斌, 但迪迪 2007 物理学报 56 1794]
[11]	Soltani M, Chaker M 2004 J. Vac. Sci. Technol. A 22 859
[12]	Zhou S, Li Y, Zhu H Q, Sun R X, Zhang Y M, Huang Y Z, Li L, Shen Y J, Zhen Q X, Tong G X, Fang B Y 2012 Surf. Coat. Technol. 206 2922.
[13]	Suzuki H, Yamaguchi K, Miyazaki H 2007 Compos. Sci. Technol. 67 1617
[14]	Saitzek S, Guinneton F, Sauques L, Aguir K, Gavarri J R 2007 Opt. Mater. 30 407
[15]	Xu G, Jin P, Tazawa M, Yoshimura K 2004 Sol. Energy Mater. Sol. Cells 83 29
[16]	Brook L A, Evans P, Foster H A, Pemble M E, Steele A, Sheel D W, Yates H M 2007 J. Photochem. Photobiol. A: Chemistry 187 53
[17]	Duchene J, Terraillon M, Pailly P, Adam G 1971 Appl. Phys. Lett. 19 115
[18]	Fisher B 1975 J. Phys. C 8 2072
[19]	Chae B G, Kim H T, Youn D H, Kang K Y 2005 Physica B 369 76
[20]	Ruzmetov D, Gopalakrishnan G, Deng J, Narayanamurti V, Ramanathan S 2010 J. Appl. Phys. 107 094305
[21]	Okimura K, Ezreena N, Sasakawa Y, Sakai J 2009 Jpn. J. Appl. Phys. 48 065003
[22]	Stefanovich G, Pergament A, Stefanovich D 2000 J. Phys.: Condens. Matter 12 8837
[23]	Kim H T, Chae B G, Youn D H, Kim G, Kang K Y, Lee S J, Kim K, Lim Y S 2005 Appl. Phys. Lett. 86 242101
[24]	Ruzmetov D, Gopalakrishnan G, Deng J D, Narayanamurti V, Ramanathan S 2009 J. Appl. Phys. 106 083702
[25]	Yang Z, Ko C, Ramanathan S 2010 J. Appl. Phys. 108 073708
[26]	Lee M J, Park Y, Suh D S, Lee E H, Seo S, Kim D C, Jung R, Kang B S, Ahn S E, Lee C B, Seo D H, Cha Y K, Yoo I K, Kim J S, Park B H 2007 Adv. Mater. 19 3919
[27]	Yang T H, Jin C M, Zhou H H, Narayan R J, Narayan J 2010 Appl. Phys. Lett. 97 702101
[28]	Heinilehto S T, Lappalainen J H, Jantunen H M, Lantto V 2011 J. Electroceram 27 7
[29]	Zhu H Q, Li Y, Zhou S, Huang Y Z, Tong G X, Sun R X, Zhang Y M, Zheng Q X, Li L, Shen Y J, Fang B Y 2011 Acta Phys. Sin. 60 098104 (in Chinese) [朱慧群, 李毅, 周晟, 黄毅泽, 佟国香, 孙若曦, 张宇明, 郑秋心, 李榴, 沈雨剪, 方宝英 2011 物理学报 60 098104]
[30]	Bowman R M, Gregg J M 1998 J. Mater. Sci: Mater. Electron. 9 187
[31]	Atrei A, Bardi U, Tarducci C, Rovida G 2000 J. Phys. Chem. B 104 3121
[32]	Continenza A, Massidda S, Posternak M 1999 Phys. Rev. B 60 15699

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Vol. 62, Issue 20 - 2013-10-20

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