Net sensitivity for open and short model based on layout optimization

Wang Jun-Ping; Qi Su-Yang; Liu Shi-Gang

doi:10.7498/aps.63.128503

Abstract

To maintain and improve the manufacturing yield of integrated circuit becomes a research hot spot in optimized circuit design and manufacturing technology, with the expansion of the integrated circuit scale and shrinkage of devices feature sizes. In order to reduce the yield loss caused by redundancy material defect and missing material defect, choosing a preferentially optimizing net becomes an important subject in the process of layout optimization. Layout optimization is an effective way to increase integrated circuit yield which is based on the critical area diminution. In the paper presented is a new kind of short circuit and open circuit sensitivity model, which is net-based and not only reflects the size of the short critical area between the single net and the nets around it, but also possesses open critical area. Because this model is based on single net and includes the information about the surrounding net, the short critical area between the single net and the net around it and the open critical area of its own can be reduced at the same time. In this way, the efficiency of layout optimization is enhanced. According to the experimental results, this sensitivity model can be used to choose the position for optimization.

Keywords:

Authors and contacts

1.
School of Communication Engineering, Xidian University, Xi'an 710071, China;
2.
School of Microelectronics, Xidian University, Xi'an 710071, China
Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 61173088, 61373172) and the Industry Technology Innovation Program of Xi'an, China (Grant No. CX12485).

References

[1]	Chiang C, Kawa J 2006 IEEE Asia Pacific Conference on Circuits and Systems Singapore, December 4-7, 2006 p1099
[2]	Raghvendra S, Hurat, Philippe 2005 The 18th International Conference on VLSI Design California, USA, January 3-7, 2005 p705
[3]	Tian X B, Xu H, Li Q J 2013 Chin. Phys. B 22 088502
[4]	Fang X D, Tang Y H, Wu J J, Zhu X, Zhou J, Huang D 2013 Chin. Phys. B 22 078901
[5]	Fang X D, Tang Y H, Wu J J 2012 Chin. Phys. B 21 098901
[6]	Muller D 2006 IEEE/ACM International Conference on Computer-Aided Design San Jose CA, November 5-9, 2006 p480
[7]	Minsik C, Hua X, Ruri R, Pan D Z 2008 IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems 27 p872
[8]	Zhu Z M, Li R, Hao B T, Yang Y T 2009 Chin. Phys. B 18 4995
[9]	Zhu Z M, Qian L B, Yang Y T 2009 Chin. Phys. B 18 1188
[10]	Wang J P, Hao Y, Zhang J M 2007 Chin. Phys. 16 1796
[11]	Wang J P, Hao Y 2006 Chin. Phys. 15 1621
[12]	Ge J, Jin Z, Su Y B, Cheng W, Liu X Y, Wu D X 2009 Acta. Phys. Sin. 58 8584 (in Chinese) [葛霁, 金智, 苏永波, 程伟, 刘新宇, 吴德馨 2009 物理学报 58 8584]
[13]	Cai D L, Song Z T, Li X, Chen H P, Chen X G 2011 Chin. Phys. Lett. 28 018501
[14]	Pan D Z, Minsik C, Kun Y, Ban Y C 2008 The 9th International Conference on Solid-State and Integrated-Circuit Technology Beijing, China, October 20-23 2008, p2232
[15]	Li X, Song Z T, Cai D L, Chen X G, Jia X L 2009 Chin. Phys. Lett. 26 128501
[16]	Ding S, Song Z T, Liu B, Zhu M, Chen X T, Chen Y F, Shen J, Fu C, Feng S L 2008 Chin. Phys. Lett. 25 3815
[17]	Ghaida R S, Doniger K, Zarkesh H P 2009 IEEE Trans. Semicond. Manufact. 22 329
[18]	Li X, Song Z T, Cai D L, Chen X G, Jia X L 2009 Chin. Phys. Lett. 26 128501
[19]	Ding S, Song Z T, Liu B, Zhu M, Chen X T, Chen Y F, Shen J, Fu C, Feng S L 2008 Chin. Phys. Lett. 25 3815
[20]	Wang J P, Hao Y 2009 Acta Phys. Sin. 58 4267 (in Chinese) [王俊平, 郝跃 2009 物理学报 58 4267]
[21]	Wang J P, Hao Y 2005 Chin. J. Semicond. 26 1514
[22]	Pan D Z, Minsik C, Kun Y 2010 Foundations and Trends in Electronic Design Automation 4 1
[23]	Pan D Z, Minsik C, Kun Y, Ban Y C 2008 The 9th International Conference on Solid-State and Integrated-Circuit Technology Beijing, China, October 20-23, 2008 p2232
[24]	Liu S G, Wang J P, Su Y B, Wang L 2012 Chin. Phys. B 21 098503
[25]	Wang J P, Ning P Wang L Su Y B, Liu S G, Wan G T, Wang S 2010 Open NSO Modeling for DFM 2nd International Conference on Information Engineering and Computer Science-Proceedings Wuhan, China, December 25-26, 2010 p1

Cited By

[1]	Chiang C, Kawa J 2006 IEEE Asia Pacific Conference on Circuits and Systems Singapore, December 4-7, 2006 p1099
[2]	Raghvendra S, Hurat, Philippe 2005 The 18th International Conference on VLSI Design California, USA, January 3-7, 2005 p705
[3]	Tian X B, Xu H, Li Q J 2013 Chin. Phys. B 22 088502
[4]	Fang X D, Tang Y H, Wu J J, Zhu X, Zhou J, Huang D 2013 Chin. Phys. B 22 078901
[5]	Fang X D, Tang Y H, Wu J J 2012 Chin. Phys. B 21 098901
[6]	Muller D 2006 IEEE/ACM International Conference on Computer-Aided Design San Jose CA, November 5-9, 2006 p480
[7]	Minsik C, Hua X, Ruri R, Pan D Z 2008 IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems 27 p872
[8]	Zhu Z M, Li R, Hao B T, Yang Y T 2009 Chin. Phys. B 18 4995
[9]	Zhu Z M, Qian L B, Yang Y T 2009 Chin. Phys. B 18 1188
[10]	Wang J P, Hao Y, Zhang J M 2007 Chin. Phys. 16 1796
[11]	Wang J P, Hao Y 2006 Chin. Phys. 15 1621
[12]	Ge J, Jin Z, Su Y B, Cheng W, Liu X Y, Wu D X 2009 Acta. Phys. Sin. 58 8584 (in Chinese) [葛霁, 金智, 苏永波, 程伟, 刘新宇, 吴德馨 2009 物理学报 58 8584]
[13]	Cai D L, Song Z T, Li X, Chen H P, Chen X G 2011 Chin. Phys. Lett. 28 018501
[14]	Pan D Z, Minsik C, Kun Y, Ban Y C 2008 The 9th International Conference on Solid-State and Integrated-Circuit Technology Beijing, China, October 20-23 2008, p2232
[15]	Li X, Song Z T, Cai D L, Chen X G, Jia X L 2009 Chin. Phys. Lett. 26 128501
[16]	Ding S, Song Z T, Liu B, Zhu M, Chen X T, Chen Y F, Shen J, Fu C, Feng S L 2008 Chin. Phys. Lett. 25 3815
[17]	Ghaida R S, Doniger K, Zarkesh H P 2009 IEEE Trans. Semicond. Manufact. 22 329
[18]	Li X, Song Z T, Cai D L, Chen X G, Jia X L 2009 Chin. Phys. Lett. 26 128501
[19]	Ding S, Song Z T, Liu B, Zhu M, Chen X T, Chen Y F, Shen J, Fu C, Feng S L 2008 Chin. Phys. Lett. 25 3815
[20]	Wang J P, Hao Y 2009 Acta Phys. Sin. 58 4267 (in Chinese) [王俊平, 郝跃 2009 物理学报 58 4267]
[21]	Wang J P, Hao Y 2005 Chin. J. Semicond. 26 1514
[22]	Pan D Z, Minsik C, Kun Y 2010 Foundations and Trends in Electronic Design Automation 4 1
[23]	Pan D Z, Minsik C, Kun Y, Ban Y C 2008 The 9th International Conference on Solid-State and Integrated-Circuit Technology Beijing, China, October 20-23, 2008 p2232
[24]	Liu S G, Wang J P, Su Y B, Wang L 2012 Chin. Phys. B 21 098503
[25]	Wang J P, Ning P Wang L Su Y B, Liu S G, Wan G T, Wang S 2010 Open NSO Modeling for DFM 2nd International Conference on Information Engineering and Computer Science-Proceedings Wuhan, China, December 25-26, 2010 p1

[1]	Kou Ke, Wang Cuo, Wang Xian, Lian Tian-Hong, Jiao Ming-Xing, Fan Yu-Zhen. Sensitivity enhancement in laser self-mixing nano-particle sizer with linear current tuning based frequency shifting method. Acta Physica Sinica, 2023, 72(16): 169501. doi: 10.7498/aps.72.20230569
[2]	Chen Da-Yong, Miao Pei-Xian, Shi Yan-Chao, Cui Jing-Zhong, Liu Zhi-Dong, Chen Jiang, Wang Kuan. Measurement of noise of current source by pump-probe atomic magnetometer. Acta Physica Sinica, 2022, 71(2): 024202. doi: 10.7498/aps.71.20211122
[3]	Liu Yi-Fan, Zhang Zhi-Yong. Carbon based electronic technology in post-Moore era: progress, applications and challenges. Acta Physica Sinica, 2022, 71(6): 068503. doi: 10.7498/aps.71.20212076
[4]	Liu Xu-Yang, Zhang He-Qiu, Li Bing-Bing, Liu Jun, Xue Dong-Yang, Wang Heng-Shan, Liang Hong-Wei, Xia Xiao-Chuan. Characteristics of AlGaN/GaN high electron mobility transistor temperature sensor. Acta Physica Sinica, 2020, 69(4): 047201. doi: 10.7498/aps.69.20190640
[5]	Zhang Wen-Jie, Liu Yu-Song, Guo Hao, Han Xing-Cheng, Cai An-Jiang, Li Sheng-Kun, Zhao Peng-Fei, Liu Jun. Methodology of improving sensitivity of silicon vacancy spin-based sensors based on double spiral coil RF resonance structure. Acta Physica Sinica, 2020, 69(23): 234206. doi: 10.7498/aps.69.20200765
[6]	Zuo Xiao-Jie, Sun Ying-Rong, Yan Zhi-Hui, Jia Xiao-Jun. High sensitivity quantum Michelson interferometer. Acta Physica Sinica, 2018, 67(13): 134202. doi: 10.7498/aps.67.20172563
[7]	Hu Ze-Hua, Ye Tao, Liu Xiong-Guo, Wang Jia. Uncertainty quantification in the calculation of keff using sensitity and stochastic sampling method. Acta Physica Sinica, 2017, 66(1): 012801. doi: 10.7498/aps.66.012801
[8]	Shi Sheng-Cai, Li Jing, Zhang Wen, Miao Wei. Terahertz high-sensitivity superconducting detectors. Acta Physica Sinica, 2015, 64(22): 228501. doi: 10.7498/aps.64.228501
[9]	Lai Zhan-Ping. Recent progress in preparation of material and device of two-dimensional MoS2. Acta Physica Sinica, 2013, 62(5): 056801. doi: 10.7498/aps.62.056801
[10]	Tian Hui-Juan, Niu Ping-Juan. Sensitivity of delta-P1 approximation model to the reduced scattering parameter. Acta Physica Sinica, 2013, 62(3): 034201. doi: 10.7498/aps.62.034201
[11]	Jiang Ying, Liang Da-Kai, Zeng Jie, Ni Xiao-Yu. Influence of monitoring point wavelength on axial strain sensitivity of high-birefringence fiber loop mirror. Acta Physica Sinica, 2013, 62(6): 064216. doi: 10.7498/aps.62.064216
[12]	Xu Jin, Xie Pin-Hua, Si Fu-Qi, Li Ang, Zhou Hai-Jin, Wu Feng-Cheng, Wang Yang, Liu Jian-Guo, Liu Wen-Qing. The sensitivity study of NO2 vertical profile retrieval by airborne platform. Acta Physica Sinica, 2013, 62(10): 104214. doi: 10.7498/aps.62.104214
[13]	Wang Guang-Qiang, Wang Jian-Guo, Tong Chang-Jiang, Li Xiao-Ze, Wang Xue-Feng. Analysis and design of semiconductor detector for high-power terahertz pulse. Acta Physica Sinica, 2011, 60(3): 030702. doi: 10.7498/aps.60.030702
[14]	Gong Yuan, Guo Yu, Rao Yun-Jiang, Zhao Tian, Wu Yu, Ran Zeng-Ling. Sensitivity analysis of hybrid fiber Fabry-Pérot refractive-index sensor. Acta Physica Sinica, 2011, 60(6): 064202. doi: 10.7498/aps.60.064202
[15]	Zhang Jin-Song, Wu Yi-Ping, Wang Yong-Guo, Tao Yuan. Thermomigration in micro interconnects in integrated circuits. Acta Physica Sinica, 2010, 59(6): 4395-4402. doi: 10.7498/aps.59.4395
[16]	Hou Jian-Ping, Ning Tao, Gai Shuang-Long, Li Peng, Hao Jian-Ping, Zhao Jian-Lin. Sensitivity analysis of refractive index measurement based on intermodal interference in photonic crystal fiber. Acta Physica Sinica, 2010, 59(7): 4732-4737. doi: 10.7498/aps.59.4732
[17]	Wang Jun-Ping, Hao Yue. Efficient WCA algorithm for 65—90 nm processes. Acta Physica Sinica, 2009, 58(6): 4267-4273. doi: 10.7498/aps.58.4267
[18]	Ren Li-Chun, Zhou Lin, Li Run-Bing, Liu Min, Wang Jin, Zhan Ming-Sheng. Dependence of sensitivity of atom interferometer gravimeters on the Raman laser pulse sequences. Acta Physica Sinica, 2009, 58(12): 8230-8235. doi: 10.7498/aps.58.8230
[19]	Zhang Xian-Peng, Ouyang Xiao-Ping, Zhang Zhong-Bing, Tian Geng, Chen Yan-Li, Li Da-Hai, Zhang Xiao-Dong. A composite Si-PIN 14MeV neutron detector. Acta Physica Sinica, 2008, 57(1): 82-87. doi: 10.7498/aps.57.82
[20]	Liu Ying, Wang Li-Jun, Guo Yun-Feng, Zhang Xiao-Juan, Gao Zong-Hui, Tian Hui-Juan. Sensitivity of spatially-resolved diffuse reflectance to high-order optical parameters. Acta Physica Sinica, 2007, 56(4): 2119-2123. doi: 10.7498/aps.56.2119

Catalog

Vol. 63, Issue 12 - 2014-06-20

Metrics

Abstract views: 4911
PDF Downloads: 376
Cited By: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

Search

Article

留言板