Phasic discharge characteristics in high power pulsed magnetron sputtering
Acta Physica Sinica
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Acta Phys. Sin  2014, Vol. 63 Issue (17): 175201     doi:10.7498/aps.63.175201
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Phasic discharge characteristics in high power pulsed magnetron sputtering
Wu Zhong-Zhen1 2, Tian Xiu-Bo2, Li Chun-Wei2, Ricky K. Y.3, Fu1, Pan Feng3
1. School of Advanced Materials, Peking University Shenzhen Graduate School, Shenzhen 518055, China;
2. State Key Laboratory of Advanced Welding Production and Technology, Harbin Institute of Technology, Harbin 150001, China;
3. Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong, China
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