Accurate measurement of templates and imprinted grating structures using Mueller matrix ellipsometry
Acta Physica Sinica
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Acta Phys. Sin  2014, Vol. 63 Issue (18): 180701     doi:10.7498/aps.63.180701
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Accurate measurement of templates and imprinted grating structures using Mueller matrix ellipsometry
Chen Xiu-Guo1, Liu Shi-Yuan1, Zhang Chuan-Wei1, Wu Yi-Ping2, Ma Zhi-Chao3, Sun Tang-You3, Xu Zhi-Mou3
1. State Key Laboratory for Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China;
2. College of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China;
3. School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
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