Simulations of electrical asymmetry effect on N<sub>2</sub>-H<sub>2</sub> capacitively coupled plasma by particle-in-cell/Monte Carlo model
Acta Physica Sinica
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Acta Phys. Sin  2014, Vol. 63 Issue (18): 185205     doi:10.7498/aps.63.185205
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Simulations of electrical asymmetry effect on N2-H2 capacitively coupled plasma by particle-in-cell/Monte Carlo model
Hao Ying-Ying, Meng Xiu-Lan, Yao Fu-Bao, Zhao Guo-Ming, Wang Jing, Zhang Lian-Zhu
College of Physics Science and Information Engineering, Hebei Normal University, Shijiazhuang 050024, China
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