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In this paper, we design a type of light trapping structure with an anodic aluminum oxide (AAO) nanograting on the surface and the backside of thin Si solar cells. Simulation of the influence of AAO's period, hole thickness, and duty cycle on thin Si solar cell's short current density are carried out by finite difference time domain method. Simulation results show that the optimum size for surface AAO is 0.5 for duty cycle, 75 nm for thickness, 440nm for period, and the optimum AAO size for rear AAO is 0.75 for duty cycle, 90nm for thickness, 380nm for period. The double AAO light trapping structure can increase the light absorption in the wavelength range from 280 to 1100nm，the absorption relative enhancement is 74.44%.
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Keywords:
- thin Si solar cell /
- anodic aluminum oxide /
- light trapping structure /
- finite difference time domain method
[1] Chen J Y, Chang W L, Huang C K, Sun K W 2011 Opt. Express 19 14411
[2] Sun C H, Ho B J, Jiang B, Jiang P 2008 Opt. Lett. 33 2224
[3] Mizutani A, Kanamori Y, Maruyama A, Kikuta H 2009 J. Opt. Soc. Am. A 26 337
[4] Li Y F, Zhang J H, Yang B 2010 Nano Today 5 117
[5] Herzinger C M, Johs B, McGahan W A, Woollam J A, Paulson W 1998 Appl. Phys. 83 3323
[6] Wada K, Kimerling L C, Toyodan N 2004 Patent 6 750 393
[7] Zeng L, Yi Y, Hong C, Liu J, Feng N, Duan X, Kinerling L C, Alamairu B A 2006 Appl. Phys. Let. 89 111111
[8] Zhu Z P, Qin Y Q 2013 Acta Phys. Sin. 62 157801(in Chinese) [朱兆平, 秦亦强 2013 物理学报 62 157801]
[9] Li G L, He L J, L J, Li X S, Liang S, Gao M M, Yuan H W 2013 Acta Phys. Sin. 62 197202(in Chinese) [李国龙, 何力军, 李进, 李学生, 梁森, 高忙忙 袁海雯 2013 物理学报 62 197202]
[10] Fang J, Qi Y H, Wang C R, Wei Z, Fang Y Ｑ, Yi Z Z, Jing X 2012 Microelectron. Eng. 103 126
[11] Bermel P, Luo C Y, Zeng L R, Lionel C, Kimerling, John D 2007 Opt. Express 15 16986
[12] Zhong H, Gao Y Y, Zhou R L, Zhou B J, Tang LQ, Wu L X, Li H J 2011 Spectrosc. Spect. Anal. 3 1739(in Chinese) [钟慧, 高永毅, 周仁龙, 周并举, 唐立强, 吴玲锡, 李宏建 2011 光谱学与光谱分析 3 1739]
[13] Cheng F X, Wang L S, Xu W Y 2013 Chin. Phys. B 22 045202
[14] James G M, Shi S Y, Chen C H, Timothy C, Allen B, Christiana H, Dennis W P 2008 Opt. Express 16 15238
[15] Joannopoulos J D, Johnson S G, Winn J N Meade R D 2008 Photonic Crystals: Molding The Flow of Light (Princeton: Princeton University Press) p44
[16] Sheng P, Bloch A, Stepleman R 1983 Appl. Phys. Lett. 43 579
[17] Morf R H, Kiess H 1989 Proceedings of Ninth E. C. Photovoltaic Solar Energy Conference Freiburg, West Germany, September 25-29, 1999 p313
[18] Kiess H, Morf R H 1989 Proceedings of the Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VⅢ San Diego, USA, August 10-11, 1989 p124
[19] Heine C, Morf R H 1995 Appl. Opt. 34 2476
[20] Zheng C G, Jiang J L, Xian F L, Qiang H X, Wu H, Li X Y 2011 Chin. Phys. B 20 094201
[21] Masuda H, Fukuda K 1995 Science 268 1466
[22] Liu H W, Guo H M, Wang Y L, Shen C M, Yang H T, Wang Y T, Wei L 2004 Acta Phys. Sin. 53 626(in Chinese) [刘虹雯, 郭海明, 王业亮, 申承民, 杨海涛, 王雨田, 魏龙 2004 物理学报 53 626]
[23] Shimizu T, Nagayanagi M, Ishida T, Sakata O, Oku T, Sakaue H, Takahagi T, Shingubara S 2006 Elctrochem. Solid-State Lett. 9 13
[24] Liu W, Liu X H, Cui W B, Gong W J, Zhang Z D 2013 Chin. Phys. B 22 027104
[25] Sheng X, Liu J F, Coronel N, Agarwal A M, Michel, Kimling L C 2010 IEEE Photonic. Tech. L. 22 1394
[26] Yang T S, Wang X D, Liu W, Shi Y P, Yang F H 2013 Opt. Express 21 18207
[27] Sheng X, Liu J F, Michel J, Agarwal A G, Kimerling L C 2009 Proceedings of the 34th IEEE Photovoltaic Specialists Conference Philadelphia, PA, June 7-12, 2009 p2395
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[1] Chen J Y, Chang W L, Huang C K, Sun K W 2011 Opt. Express 19 14411
[2] Sun C H, Ho B J, Jiang B, Jiang P 2008 Opt. Lett. 33 2224
[3] Mizutani A, Kanamori Y, Maruyama A, Kikuta H 2009 J. Opt. Soc. Am. A 26 337
[4] Li Y F, Zhang J H, Yang B 2010 Nano Today 5 117
[5] Herzinger C M, Johs B, McGahan W A, Woollam J A, Paulson W 1998 Appl. Phys. 83 3323
[6] Wada K, Kimerling L C, Toyodan N 2004 Patent 6 750 393
[7] Zeng L, Yi Y, Hong C, Liu J, Feng N, Duan X, Kinerling L C, Alamairu B A 2006 Appl. Phys. Let. 89 111111
[8] Zhu Z P, Qin Y Q 2013 Acta Phys. Sin. 62 157801(in Chinese) [朱兆平, 秦亦强 2013 物理学报 62 157801]
[9] Li G L, He L J, L J, Li X S, Liang S, Gao M M, Yuan H W 2013 Acta Phys. Sin. 62 197202(in Chinese) [李国龙, 何力军, 李进, 李学生, 梁森, 高忙忙 袁海雯 2013 物理学报 62 197202]
[10] Fang J, Qi Y H, Wang C R, Wei Z, Fang Y Ｑ, Yi Z Z, Jing X 2012 Microelectron. Eng. 103 126
[11] Bermel P, Luo C Y, Zeng L R, Lionel C, Kimerling, John D 2007 Opt. Express 15 16986
[12] Zhong H, Gao Y Y, Zhou R L, Zhou B J, Tang LQ, Wu L X, Li H J 2011 Spectrosc. Spect. Anal. 3 1739(in Chinese) [钟慧, 高永毅, 周仁龙, 周并举, 唐立强, 吴玲锡, 李宏建 2011 光谱学与光谱分析 3 1739]
[13] Cheng F X, Wang L S, Xu W Y 2013 Chin. Phys. B 22 045202
[14] James G M, Shi S Y, Chen C H, Timothy C, Allen B, Christiana H, Dennis W P 2008 Opt. Express 16 15238
[15] Joannopoulos J D, Johnson S G, Winn J N Meade R D 2008 Photonic Crystals: Molding The Flow of Light (Princeton: Princeton University Press) p44
[16] Sheng P, Bloch A, Stepleman R 1983 Appl. Phys. Lett. 43 579
[17] Morf R H, Kiess H 1989 Proceedings of Ninth E. C. Photovoltaic Solar Energy Conference Freiburg, West Germany, September 25-29, 1999 p313
[18] Kiess H, Morf R H 1989 Proceedings of the Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VⅢ San Diego, USA, August 10-11, 1989 p124
[19] Heine C, Morf R H 1995 Appl. Opt. 34 2476
[20] Zheng C G, Jiang J L, Xian F L, Qiang H X, Wu H, Li X Y 2011 Chin. Phys. B 20 094201
[21] Masuda H, Fukuda K 1995 Science 268 1466
[22] Liu H W, Guo H M, Wang Y L, Shen C M, Yang H T, Wang Y T, Wei L 2004 Acta Phys. Sin. 53 626(in Chinese) [刘虹雯, 郭海明, 王业亮, 申承民, 杨海涛, 王雨田, 魏龙 2004 物理学报 53 626]
[23] Shimizu T, Nagayanagi M, Ishida T, Sakata O, Oku T, Sakaue H, Takahagi T, Shingubara S 2006 Elctrochem. Solid-State Lett. 9 13
[24] Liu W, Liu X H, Cui W B, Gong W J, Zhang Z D 2013 Chin. Phys. B 22 027104
[25] Sheng X, Liu J F, Coronel N, Agarwal A M, Michel, Kimling L C 2010 IEEE Photonic. Tech. L. 22 1394
[26] Yang T S, Wang X D, Liu W, Shi Y P, Yang F H 2013 Opt. Express 21 18207
[27] Sheng X, Liu J F, Michel J, Agarwal A G, Kimerling L C 2009 Proceedings of the 34th IEEE Photovoltaic Specialists Conference Philadelphia, PA, June 7-12, 2009 p2395
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