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[110] images are taken for 3C-SiC/(001)Si hetero epitaxial films containing small-angle grain boundaries by using a 200 kV LaB6 filament high-resolution transmission electron microscope. Deconvolution processing is performed to transform the experimental images which do not represent intuitively the projected crystal structure into structure images. First, Si and C atomic columns with a distance of 0.109 nm are resolved in a perfect structure image region, and then recognized from each other by analyzing the image contrast change with sample thickness based on the pseudo-weak phase object approximation. Subsequently, two complex dislocation cores located in the vicinity of small-angle grain boundaries are obtained at an atomic level, and the atomic structure models are constructed and confirmed by matching the experimental images with the simulated ones. Hence, the atomic configurations of dislocation cores are derived from only a single experimental image with the average structure of perfect crystal known in advance. The formation of small-angle grain boundaries in 3C-SiC/Si with the occurence of complex dislocations in their vicinity is discussed.
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Keywords:
- image deconvolution /
- low-angle grain boundary /
- dislocation core structure /
- 3C-SiC
[1] Nishino S, Powell J A, Will H A 1983 Appl. Phys. Lett. 42 460
[2] Davis R F, Kelner G, Shur M, Palmour J W, Edmond J A 1991 Proc. IEEE 79 677
[3] Inamoto S, Yamasaki J, Tamaki H, Tanaka N 2011 Philos. Mag. Lett. 91 632
[4] Yamasaki J, Inamoto S, Nomura Y, Tamaki H, Tanaka N 2012 J. Phys. D: Appl. Phys. 45 494002
[5] Cowley J M, Iijma S 1972 Z. Naturforsch. A 27 445
[6] Uyeda N, Kobayash T, Suito E, Harada Y, Watanabe M 1972 J. Appl. Phys. 43 5181
[7] Izui K, Furuno S, Nishida T, Otsu H 1978-79 Chem. Scr. 14 99
[8] Amelinckx S 1978-79 Chem. Scr. 14 197
[9] Shen X, Cheng D, Zhao H F, Yao Y, Liu X Y, Yu R C 2013 Chin. Phys. B 22 116102
[10] Ichinose H 2000 Sci. Technol. Adv. Mat. 1 11
[11] Chen J H, Zandbergen H W, van Dyck D 2004 Ultramicroscopy 98 81
[12] Heuer A H, Jia C L, Lagerlöf K P D 2010 Science 330 1227
[13] Schiske P 1968 Proceedings of the 4th European Regional Conference on Electron Microscopy Rome, Italy, September 1-7, 1968 p145
[14] Kirkland E J 1984 Ultramicroscopy 15 151
[15] Saxton W O 1986 Proceedings of the 11th International Congress on Electron Microscopy Kyoto, Japan, August 31-September 7, 1986 p26
[16] Thust A, Coene W M J, Op de Beeck M, van Dyck D 1996 Ultramicroscopy 64 211
[17] Hsieh W K, Chen F R, Kai J J, Kirkland A I 2004 Ultramicroscopy 98 99
[18] Li F H, Fan H F 1979 Acta Phys. Sin. 28 276 (in Chinese) [李方华, 范海福 1979 物理学报 28 276]
[19] Han F S, Fan H F, Li F H 1986 Acta Crystallogr. A 42 353
[20] Li F H 2005 Sci. Technol. Adv. Mat. 6 755
[21] Li F H 2010 Phys. Stat. Sol. A 207 2639
[22] He W Z, Li F H, Chen H, Kawasaki K, Oikawa T 1997 Ultramicroscopy 70 1
[23] Shiojiri M, Kaito C, Sekimoto S, Nakamura N 1982 Philos. Mag. A 46 495
[24] Wang D, Li F H, Zou J 2000 Ultramicroscopy 85 131
[25] Wang D, Chen H, Li F H, Kawasaki K, Oikawa T 2002 Ultramicroscopy 93 139
[26] Wang D, Zou J, He W Z, Chen H, Li F H, Kawasaki K, Oikawa T 2004 Ultramicroscopy 98 259
[27] Tang C Y, Li F H, Wang R, Zou J, Zheng X H, Liang J W 2007 Phys. Rev. B 75 184103
[28] Wen C, Wang Y M, Wan W, Li F H, Liang J W, Zou J 2009 J. Appl. Phys. 106 073522
[29] Wen C, Li F H, Zou J, Chen H 2010 Acta Phys. Sin. 59 1928 (in Chinese) [温才, 李方华, 邹进, 陈弘 2010 物理学报 59 1928]
[30] Wan W, Tang C Y, Wang Y M, Li F H 2005 Acta Phys. Sin. 54 4273 (in Chinese) [万威, 唐春艳, 王玉梅, 李方华 2005 物理学报 54 4273]
[31] Cui Y X, Wang Y M, Wen C, Ge B H, Li F H, Chen Y, Chen H 2013 Ultramicroscopy 126 77
[32] Li F H 2009 Electron Crystallography and Image Processing (Shanghai: Shanghai Scientific and Technical Publishers) pp259-386 (in Chinese) [李方华 2009 电子晶体学与图像处理 (上海: 上海科学技术出版社) 第259–386页]
[33] Thon F 1966 Z. Naturforsch. A 21 476
[34] Li F H, Wang D, He W Z, Jiang H 2000 J. Electron Microsc. 49 17
[35] Li F H, Tang D 1985 Acta Cryst. A41 376
[36] Tang C Y, Li F H 2005 J. Electron Microsc. 54 445
[37] Cowley J M, Moodie A F 1957 Acta Cryst. 10 609
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[1] Nishino S, Powell J A, Will H A 1983 Appl. Phys. Lett. 42 460
[2] Davis R F, Kelner G, Shur M, Palmour J W, Edmond J A 1991 Proc. IEEE 79 677
[3] Inamoto S, Yamasaki J, Tamaki H, Tanaka N 2011 Philos. Mag. Lett. 91 632
[4] Yamasaki J, Inamoto S, Nomura Y, Tamaki H, Tanaka N 2012 J. Phys. D: Appl. Phys. 45 494002
[5] Cowley J M, Iijma S 1972 Z. Naturforsch. A 27 445
[6] Uyeda N, Kobayash T, Suito E, Harada Y, Watanabe M 1972 J. Appl. Phys. 43 5181
[7] Izui K, Furuno S, Nishida T, Otsu H 1978-79 Chem. Scr. 14 99
[8] Amelinckx S 1978-79 Chem. Scr. 14 197
[9] Shen X, Cheng D, Zhao H F, Yao Y, Liu X Y, Yu R C 2013 Chin. Phys. B 22 116102
[10] Ichinose H 2000 Sci. Technol. Adv. Mat. 1 11
[11] Chen J H, Zandbergen H W, van Dyck D 2004 Ultramicroscopy 98 81
[12] Heuer A H, Jia C L, Lagerlöf K P D 2010 Science 330 1227
[13] Schiske P 1968 Proceedings of the 4th European Regional Conference on Electron Microscopy Rome, Italy, September 1-7, 1968 p145
[14] Kirkland E J 1984 Ultramicroscopy 15 151
[15] Saxton W O 1986 Proceedings of the 11th International Congress on Electron Microscopy Kyoto, Japan, August 31-September 7, 1986 p26
[16] Thust A, Coene W M J, Op de Beeck M, van Dyck D 1996 Ultramicroscopy 64 211
[17] Hsieh W K, Chen F R, Kai J J, Kirkland A I 2004 Ultramicroscopy 98 99
[18] Li F H, Fan H F 1979 Acta Phys. Sin. 28 276 (in Chinese) [李方华, 范海福 1979 物理学报 28 276]
[19] Han F S, Fan H F, Li F H 1986 Acta Crystallogr. A 42 353
[20] Li F H 2005 Sci. Technol. Adv. Mat. 6 755
[21] Li F H 2010 Phys. Stat. Sol. A 207 2639
[22] He W Z, Li F H, Chen H, Kawasaki K, Oikawa T 1997 Ultramicroscopy 70 1
[23] Shiojiri M, Kaito C, Sekimoto S, Nakamura N 1982 Philos. Mag. A 46 495
[24] Wang D, Li F H, Zou J 2000 Ultramicroscopy 85 131
[25] Wang D, Chen H, Li F H, Kawasaki K, Oikawa T 2002 Ultramicroscopy 93 139
[26] Wang D, Zou J, He W Z, Chen H, Li F H, Kawasaki K, Oikawa T 2004 Ultramicroscopy 98 259
[27] Tang C Y, Li F H, Wang R, Zou J, Zheng X H, Liang J W 2007 Phys. Rev. B 75 184103
[28] Wen C, Wang Y M, Wan W, Li F H, Liang J W, Zou J 2009 J. Appl. Phys. 106 073522
[29] Wen C, Li F H, Zou J, Chen H 2010 Acta Phys. Sin. 59 1928 (in Chinese) [温才, 李方华, 邹进, 陈弘 2010 物理学报 59 1928]
[30] Wan W, Tang C Y, Wang Y M, Li F H 2005 Acta Phys. Sin. 54 4273 (in Chinese) [万威, 唐春艳, 王玉梅, 李方华 2005 物理学报 54 4273]
[31] Cui Y X, Wang Y M, Wen C, Ge B H, Li F H, Chen Y, Chen H 2013 Ultramicroscopy 126 77
[32] Li F H 2009 Electron Crystallography and Image Processing (Shanghai: Shanghai Scientific and Technical Publishers) pp259-386 (in Chinese) [李方华 2009 电子晶体学与图像处理 (上海: 上海科学技术出版社) 第259–386页]
[33] Thon F 1966 Z. Naturforsch. A 21 476
[34] Li F H, Wang D, He W Z, Jiang H 2000 J. Electron Microsc. 49 17
[35] Li F H, Tang D 1985 Acta Cryst. A41 376
[36] Tang C Y, Li F H 2005 J. Electron Microsc. 54 445
[37] Cowley J M, Moodie A F 1957 Acta Cryst. 10 609
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