Abstract A three-dementional(3D) kinetic model method for KrF laser is presented. The major difference between the method and the previous kinetic method for KrF laser is that the space nonuniform for the electronic pump is considered. The pump rate is considered as a function of 3D-space (X,Y,Z) and time (t). Using the 3D model method, 96101702 experiment is simulated . The calculated laser energy output and lens energy distribution is in agreement with the experimental results. The problem that the calculated result of 1D model is obviously-higher than the experimental result is solved.