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Silicon nitride films prepared by helicon wave plasam-enhanced chemical vapour deposition

Yu Wei Liu Li-Hui Hou Hai-Hong Ding Xue-Cheng Han Li Fu Guang-Sheng

Citation:

Silicon nitride films prepared by helicon wave plasam-enhanced chemical vapour deposition

Yu Wei, Liu Li-Hui, Hou Hai-Hong, Ding Xue-Cheng, Han Li, Fu Guang-Sheng
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  • Abstract views:  7422
  • PDF Downloads:  1285
  • Cited By: 0
Publishing process
  • Received Date:  23 July 2002
  • Accepted Date:  18 September 2002
  • Published Online:  03 April 2005

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