Blue photoluminescence of aSiOxNy films prepared by ECR-CVD
Acta Physica Sinica
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Acta Phys. Sin.  2003, Vol. 52 Issue (5): 1287-1291    
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Blue photoluminescence of aSiOxNy films prepared by ECR-CVD
Lu Xin-Hua1, Xiang Su-Liu1, Xu Sheng-Hua2, Xin Yu2, Ning Zhao-Yuan2, Cheng Shan-Hua2, Huang Song2, Chen Jun2
(1)苏州大学分析测试中心,苏州 215006; (2)苏州大学物理系薄膜材料实验室,苏州 215006
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