Diagnosis of VHF plasmas with optical emission spectroscopy
Acta Physica Sinica
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Acta Phys. Sin.  2003, Vol. 52 Issue (9): 2324-2330    
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Diagnosis of VHF plasmas with optical emission spectroscopy
Wu Chun-Ya1, Li Hong-Bo1, Mai Yao-Hua1, Zhu Feng1, Zhou Zhen-Hua1, Zhao Ying1, Geng Xin-Hua1, Xiong Shao-Zheng1, Yang Hui-Dong2
(1)南开大学光电子所,天津 300071; (2)南开大学光电子所,天津 300071;东华大学理学院,上海 200051
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