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The study on the microstructure of TiN and Ti1-xSixNy coatings

Zhang Chen-Hui Luo Jian-Bin Li Wen-Zhi Chen Da-Rong

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The study on the microstructure of TiN and Ti1-xSixNy coatings

Zhang Chen-Hui, Luo Jian-Bin, Li Wen-Zhi, Chen Da-Rong
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  • The microstructure of TiN coatings and Ti1-xSixNy nanocomposite coatings was studied by means of x-ray diffrection, x-ray photoelection spectroscopy, high resolution transmission electron microscopy and atomic force microscopy. The results showed that the Ti1-xSixNy coatings consisted of TiN nanocrystallites with grain size of 3-5nm and amorphous Si3N4 phase. The roughness of Ti1-xSixNy coatings was less than that of TiN coatings prepared under the same conditions. The orientation of TiN crystals in the Ti1-xSixNy coatings was discussed on the basis of interface energy.
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  • Abstract views:  8300
  • PDF Downloads:  761
  • Cited By: 0
Publishing process
  • Received Date:  14 March 2003
  • Accepted Date:  30 May 2003
  • Published Online:  15 January 2004

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