XPS study of fluorinated diamond-like carbon films prepared by reactive magnetron sputtering
Acta Physica Sinica
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Acta Phys. Sin.  2004, Vol. 53 Issue (9): 3220-3224    
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XPS study of fluorinated diamond-like carbon films prepared by reactive magnetron sputtering
Jiang Mei-Fu, Ning Zhao-Yuan
苏州大学物理科学与技术学院,苏州 215006
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