Acta Physica Sinica
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2006, Vol. 55(7): 3494-3500    DOI: 10.7498/aps.55.3494
Generation of multi-source inductively coupled plasma and its diagnostics
Xin Yu, Di Xiao-Lian, Yu Yi-Qing, Ning Zhao-Yuan
苏州大学物理科学与技术学院,江苏省薄膜材料重点实验室,苏州 215006
Received 2005-11-28  Revised 2005-12-15
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