Acta Physica Sinica
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2009, Vol. 58(4): 2565-2571    DOI: 10.7498/aps.58.2565
Infrared analysis on hydrogen content and Si—H bonding configuration of hydrogenated nanocrystalline silicon thin films
Chen Cheng-Zhao1, Li Ping1, Lin Xuan-Ying1, Liu Cui-Qing1, Qiu Sheng-Hua1, Wu Yan-Dan1, Yu Chu-Ying2
(1)韩山师范学院物理与电子工程系,潮州 521041;汕头大学物理系,汕头 515063; (2)汕头大学物理系,汕头 515063
Received 2008-06-16  Revised 2008-09-24
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