Acta Physica Sinica
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2012, Vol. 61(3): 36802-036802    DOI: 10.7498/aps.61.036802
Real time and ex situ spectroscopic ellipsometry analysis microcrystalline silicon thin films growth
Li Xin-Li1, Gu Jin-Hua1, Gao Hai-Bo1, Chen Yong-Sheng1, Gao Xiao-Yong1, Yang Shi-E1, Lu Jing-Xiao1, Li Rui1 2, Jiao Yue-Chao1
1. Key Laboratory of Material Physics of Ministry of Education, School of Physical Engineering and Material Physics Laboratory, Zhengzhou University, Zhengzhou 450052, China;
2. Henan University of Technology, Zhengzhou 450051, China
Received 2011-01-13  Revised 2011-05-30
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