Acta Physica Sinica
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2012, Vol. 61(7): 75204-075204    DOI: 10.7498/aps.61.075204
Application of floating microwave resonator probe to the measurement of electron density in electronegative capacitively coupled plasma
Zou Shuai,Tang Zhong-Hua,Ji Liang-Liang,Su Xiao-Dong,Xin Yu
Provincial Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006, China
Received 2011-06-07  Revised 2012-04-05
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