Acta Physica Sinica
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2013, Vol. 62(10): 108201-108201    DOI: 10.7498/aps.62.108201
A three-dimensional surface evolution algorithm based on cellular model for etching process
Zheng Shu-Lin, Song Yi-Xu, Sun Xiao-Min
Department of Computer Science and Technology, Tsinghua University, State Key Laboratory of Intelligent Technology and Systems, Beijing 100084, China
Received 2012-10-24  Revised 2012-12-13
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