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摘要: 背散射因子是俄歇定量分析中要考虑的主要因素。本文提出一种利用微分前俄歇谱N(E)背景求得背散射因子的新方法。由于使背散射因子的计算与能谱相结合,这种方法不但可以避免Monte Carlo的冗长计算,还能进一步提高定量分析的精度。文中列举了用该方法对Au-Cu和Ag-Cu两种合金的定量分析结果,并与Monte Carlo和相对灵敏度因子方法的结果进行了比较。
Abstract: A new method is proposed for determining the backscattering factor using information provided by the background off an direct Auger spectrum N(E). Complicated calculations such as the Monte Carlo method were avoided, and the quantitative Auger analysis accuracy could be further improved since the calculations of backscattering factor was based on the spectra. The examples of determining the compositions of Au-Cu and Ag-Cu alloys are given. These results are compared with that obtained by other mothods.