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物理学报. 1991, 40(2): 316-322.
doi: 10.7498/aps.40.316.
溅射原子角分布与靶点表面形貌的关联研究
- 收稿日期: 1990-04-24
- 修回日期: 1990-05-21
- 刊出日期: 1991-01-05
摘要: 27keV的Ar+离子垂直轰击处于不同温度的Cd靶,用捕获膜技术和Rutherford背散射谱仪(RBS)测定溅射原子角分布,并对所有样品的靶点形貌进行扫描电子显微镜(SEM)观察。结果发现,所有的角分布都呈over-cosine形状,但是在极角为0°处实验值与cosine值的偏离△,是不同的,在靶温度为150℃时的偏离△T小于在室温时的偏离△R,亦即△TR,提出一个简单的模型对这种溅射角分布
English Abstract
A RESEARCH OF THE CORRELATION BETWEEN SURFACE TOPOGRAPHY AND ANGULAR DISTRIBUTION OF SPUTTERED ATOMS
- Received Date:
24 April 1990
- Accepted Date:
21 May 1990
- Published Online:
05 January 1991
Abstract: The angular distributions of sputtered atoms of cadmium have been measured with 27 keV Ar+ ion bombardment at normal incidence with different target temperature by using collector technique and RBS analysis. After the sputtering experiment the surface structures have been observed using scanning electron microscope. For all samples the angular distributions are over-cosine. However, the values of the deviation △ from the cosine distribution at the axis of polar angle of 0°is not all the same. The deviation △T at the target temperature of 150℃ △R is smaller than that at room teperature. ie. △TR. A simple model is proposed to explain the formation of pattern of angular distribution.
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