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物理学报. 2000, 49(11): 2225-2229.
doi: 10.7498/aps.49.2225.
薄膜生长的理论模型与Monte Carlo模拟
- 收稿日期: 2000-04-21
- 修回日期: 2000-06-11
- 刊出日期: 2000-11-20
摘要: 用Monte Carlo方法模拟了薄膜的二维生长.引入Morse作用势描述粒子间的相互作用情况，研究了相互作用范围α对薄膜生长初期形貌的影响.薄膜的生长经历了由临界核的形成、团的长大、形成迷津结构到连续成膜4个阶段.模拟结果表明，随着沉积粒子数的增加，成团粒子所占百分比下降.这与实际情况相符.
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关键词:
- 薄膜生长 /
- Monte Carlo方法 /
- Morse势
English Abstract
MONTE CARLO SIMULATION OF THIN FILMS GROWTH
- Received Date:
21 April 2000
- Accepted Date:
11 June 2000
- Published Online:
20 November 2000
Abstract: Two-dimensional growth of thin films is simulated using the Monte Carlo method.The effect of the interaction between particles on the morphology of the films at the preliminary stage has been investigated using Morse potential.The growth of films consists of four stages,including formation of critical nucleus,growth of clusters,formation of maze structure and appearance of continuous film.The simulated results indicate that the percentage of particles,with monomers being not included,decreases with the increase of the number of adatoms,which is in agreement with the actual conditions.
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Keywords:
- thin film growth /
- Monte Carlo method /
- Morse potential
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