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Abstract: The microscopic structures of the diamond films generated on Si (100) substrates by chemical vapor deposition have been studied by x-ray wide angle diffraction spectroscopy, grazing incidence x-ray scattering spectra, positrons annihilation lifetime spectroscopy, and qualitative software and Positronfit program. The di ffraction x-ray spectra show a structure difference between the near substrate p art (NSP) and near free-surface part (NFP) of the diamond film specimens, which reflect the weak [111]texture in NSP and the strong[220] texture in NFP. The positron annihilation lifetime spectroscopy of the specirnens and the analyzing data indicate that the majority of positrons annihilate around 200 ps and 400 p s. The vacancies, vacancy clusters, and voids were found in the film specimens, depending on the processes in which the chemical vapor deposition is generated.