搜索

x
中国物理学会期刊

Ar环境气压对脉冲激光烧蚀制备纳米Si晶粒平均尺寸的影响

CSTR: 32037.14.aps.54.1683

Influence of the ambient pressure of Ar on the average size of Si nanoparticles deposited by pulsed laser ablation

CSTR: 32037.14.aps.54.1683
PDF
导出引用
  • 采用XeCl脉冲准分子激光器,烧蚀高阻抗单晶Si靶,在1—500 Pa的Ar气环境下沉积制备了纳米Si薄膜. x射线衍射谱测量证实,纳米Si晶粒已经形成.利用扫描电子显微镜观测了所形成纳米Si薄膜的表面形貌,结果表明,随着环境气压的增加,所形成的纳米Si晶粒的平均尺寸增大,气压为100 Pa时达到最大值20 nm,而后开始减小. 从晶粒形成动力学角度,对实验结果进行了定性分析.

     

    The nanocrystalline silicon films were prepared by pulsed laser ablation at the ambient pressures from 1 to 500 Pa of pure Ar gas. The x-ray diffraction spectrum indicates that the films are nanocrystalline, i.e. they are composed of Si nanoparticles. Scanning electron microscopy shows that with increasing gas pressur e, the average size of Si nanoparticles first increases and reaches its maximum (20nm) at 100Pa, and then decreases. The dynamics are analysed theoretically to explain the phenomenon. Furthermore, our result is compared with that in He gas.

     

    目录

    /

    返回文章
    返回