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物理学报. 2007, 56(7): 3820-3826.
doi: 10.7498/aps.56.3820.
热超声键合换能系统动力学特性的非线性检验
- 收稿日期: 2006-08-25
- 修回日期: 2006-12-10
- 刊出日期: 2007-07-20
English Abstract
Study of nonlinear identification of time series of vibration on transducer in ultrasonic bonding system
- Received Date:
25 August 2006
- Accepted Date:
10 December 2006
- Published Online:
20 July 2007
Abstract: Using high temperatures and ultrasonic, ultrasonic bonding is one of the main methods in the wire bonding technology of the MEMS. The vibrations of transducer were tested. Based on the phase reconstruction theory, identification of the nonlinear characteristics was developed. In comparison with the time series along the axial direction, pitching direction and the horizontal direction, the correlated dimensions have been calculated, clearly describing the nonlinear dynamic characteristics of the transducer. It is helpful for understanding of transducer and can be used as a guide for modeling of this complicated structure.
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Keywords:
- ultrasonic bonding /
- time series /
- phase-randomized /
- surrogate data
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