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中国物理学会期刊

应变Si/(001)S1-xGex本征载流子浓度模型

CSTR: 32037.14.aps.59.2064

Model of intrinsic carrier concentration of strained Si/(001)Si1-xGex

CSTR: 32037.14.aps.59.2064
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  • 利用应变Si CMOS技术提高载流子迁移率是当前研究发展的重点,本征载流子浓度是应变Si材料的重要物理参数,也是决定应变Si器件电学特性的重要参量.本文基于K.P理论框架,从分析应变Si/(001)Si1-xGex材料能带结构出发,详细推导建立了300K时与Ge组分(x)相关的本征载流子浓度模型.该数据量化模型可为Si基应变器件物理的理解及器件的研究设计提供有价值的参考.

     

    There is great interest in using the strained Si CMOS technology lately for carrier mobility enhancement. Intrinsic carrier concentration is the important physical parameter for the characterization of strained Si materials and the determination of the electrical properties of strained Si-based devices. Starting from analyzing the band structure of strained Si/(001)Si1-xGex,the model of its intrinsic carrier concentration related to Ge fraction (x) at 300 K was established with the frame of K.P theory,which provides valuable reference to the understanding on the strained Si-based device physics and its design.

     

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