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[1] Thornton J A 1978 J. Vac. Sci. Technol. A 15 171
[2] Rossnagel S M, Kaufman H R 1987 J. Vac. Sci. Technol. A 5 2276
[3] Sheridan T E, Goree J 1989 J. Vac. Sci. Technol. A 7 1014
[4] Martines E, Spolaore M, Tramontin L, Cavazzana R, Serianni G, Zuin M, Antoni V 2001 Phys. Plasmas 8 3042
[5] Bohm D, Gross E P 1949 Phys. Rev. 75 1851
[6] Hoh F C 1962 Rev. Modern Phys. 34 267
[7] Simon A 1963 Phys. Fluids 6 382
[8] Mu Z X, Li G Q, Che D L 2004 Acta Phys. Sin. 53 1994 (in Chinese) [牟宗信、 李国卿、 车德良 2004 物理学报 53 1994]
[9] Mu Z X, Li G Q, Qin F W, Huang K Y, Che D L 2005 Acta Phys. Sin. 54 1378 (in Chinese) [牟宗信、 李国卿、 秦福文、 黄开玉、 车德良 2005 物理学报 54 1378 ]
[10] Brochard F, Gravier E, Bonhomme G 2005 Phys. Plasma 12 1
[11] Bradley J W, Thompson S, Gonzalvo Y A 2001 Plasma Sources Sci. Technol. 10 490
[12] Ma T C, Hu X W, Chen Y H 1988 The Principle of Plasma Physics (Hefei: Chinese Science and Technology University Press) p340 (in Chinese) [马腾才、 胡希伟、 陈银华 1988 等离子体物理 (合肥:中国科技大学出版社) 第340页]
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[1] Thornton J A 1978 J. Vac. Sci. Technol. A 15 171
[2] Rossnagel S M, Kaufman H R 1987 J. Vac. Sci. Technol. A 5 2276
[3] Sheridan T E, Goree J 1989 J. Vac. Sci. Technol. A 7 1014
[4] Martines E, Spolaore M, Tramontin L, Cavazzana R, Serianni G, Zuin M, Antoni V 2001 Phys. Plasmas 8 3042
[5] Bohm D, Gross E P 1949 Phys. Rev. 75 1851
[6] Hoh F C 1962 Rev. Modern Phys. 34 267
[7] Simon A 1963 Phys. Fluids 6 382
[8] Mu Z X, Li G Q, Che D L 2004 Acta Phys. Sin. 53 1994 (in Chinese) [牟宗信、 李国卿、 车德良 2004 物理学报 53 1994]
[9] Mu Z X, Li G Q, Qin F W, Huang K Y, Che D L 2005 Acta Phys. Sin. 54 1378 (in Chinese) [牟宗信、 李国卿、 秦福文、 黄开玉、 车德良 2005 物理学报 54 1378 ]
[10] Brochard F, Gravier E, Bonhomme G 2005 Phys. Plasma 12 1
[11] Bradley J W, Thompson S, Gonzalvo Y A 2001 Plasma Sources Sci. Technol. 10 490
[12] Ma T C, Hu X W, Chen Y H 1988 The Principle of Plasma Physics (Hefei: Chinese Science and Technology University Press) p340 (in Chinese) [马腾才、 胡希伟、 陈银华 1988 等离子体物理 (合肥:中国科技大学出版社) 第340页]
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