-
[1] Janseny H, Gardeniers H, Boer M D, Miko, Elwenspoek, Fluitman J 1996 J. Micromech. Microeng. 6 14
[2] Athavale S D, Economou D J 1996 J. Vac. Sci. Technol. B 14 3702
[3] Dai Z L, Mao M, Wang Y N 2006 Physics 35 698 (in Chinese) [戴忠玲、毛 明、王友年 2006 物理 35 698]
[4] Yugo O, Ono K 2008 J. Vac. Sci. Technol. B 26 1425
[5] Teraoka, Yuden, Nishiyama, Iwao 1993 Appl. Phys. Lett. 63 3355
[6] Rangelow I W, Löschner H 1995 J. Vac. Sci. Technol. B 13 2394
[7] Aldao C M, Agrawal A, Butera R E, Weaver J H 2009 Phys. Rev. B 79 125303
[8] Lu D J, Jiang Z D 2007 Chin. J. Vac. Sci. Technol. 27 25 (in Chinese) [卢德江、蒋庄德 2007 真空科学与技术学报 27 25]
[9] Rutkūnien , Grigonis A, R za A, Babonas J G, Jotautis A 2003 Physics and Chemistry of Solid State 4 407
[10] Samukawa S, Jinnai B, Oda F, Morimoto Y 2007 Jpn. J. Appl. Phys 46 L64
[11] Gou F, Gleeson M A, Kleyn A W 2007 Surf. Sci. 601 76
[12] Kolfschoten A W, Haring R A, Haring A, Vries A E 1984 J. Appl. Phys. 55 3813
[13] Agrawal A, Butera R E, Weaver J H 2007 Phys. Rev. Lett. 98 136104
[14] Materer N, Goodman R S, Leone S R 2000 J. Phys. Chem. B 104 3261
[15] Ohta H, Hamaguchi S 2001 J. Chem. Phys. 115 6679
[16] Hanson D E, Kress J D, Voter A F 1999 J. Chem. Phys. 110 5983
[17] Humbird D, Graves D B 2004 J. Appl. Phys. 96 791
[18] Barone, Robinson, Graves 1996 IEEE T. Plasma. Sci. 24 77
[19] Ohta H, Hamaguchi S 2001 J. Vac. Sci. Technol. A 19 2373
[20] Yan C, Lü H F, Zhang C, Zhang Q Y 2006 Acta Phys. Sin. 55 1351 (in Chinese) [严 超、吕海峰、张 超、张庆渝 2006 物理学报 55 1351]
[21] Jia Z M, Yang G Q, Chen Z N, Liu X H, Zhou S C 1994 Acta Phys. Sin. 43 1809 (in Chinese) [郏正明、杨根庆、程兆年、柳襄怀、邹世昌 1994 物理学报 43 1809]
[22] Dai Y B, Shen H S, Zhang Z M, He X C, Hu X J, Sun F H, Xin H W 2001 Acta Phys. Sin. 50 244 (in Chinese) [戴永兵、沈荷生、张志明、何贤昶、胡晓君、孙方宏、莘海维 2001 物理学报 50 244]
[23] Hanson D E, Voter A F, Kress J D 1997 J. Appl. Phys. 82 3552
[24] Gou F, Kleyn A W, Gleeson M A 2008 Int. Rev. Phys. Chem. 27 229
[25] Swope W C, Andersen H C, Berens P H, Wilson K R 1982 J. Chem. Phys. 76 637
[26] Humbird D, Graves D B 2004 J. Chem. Phys. 120 2405
[27] Abrams C F, Graves D B 1999 J. Appl. Phys. 86 5938
[28] Berendsen H J C, Postma J P M, Gunsteren W F, DiNola A, Haak J R 1984 J. Chem. Phys. 81 3684
[29] Herman I P, Donnelly V M, Cheng C C, Guinn K V 1996 Jpn. J. Appl. Phys. 35 2410
-
[1] Janseny H, Gardeniers H, Boer M D, Miko, Elwenspoek, Fluitman J 1996 J. Micromech. Microeng. 6 14
[2] Athavale S D, Economou D J 1996 J. Vac. Sci. Technol. B 14 3702
[3] Dai Z L, Mao M, Wang Y N 2006 Physics 35 698 (in Chinese) [戴忠玲、毛 明、王友年 2006 物理 35 698]
[4] Yugo O, Ono K 2008 J. Vac. Sci. Technol. B 26 1425
[5] Teraoka, Yuden, Nishiyama, Iwao 1993 Appl. Phys. Lett. 63 3355
[6] Rangelow I W, Löschner H 1995 J. Vac. Sci. Technol. B 13 2394
[7] Aldao C M, Agrawal A, Butera R E, Weaver J H 2009 Phys. Rev. B 79 125303
[8] Lu D J, Jiang Z D 2007 Chin. J. Vac. Sci. Technol. 27 25 (in Chinese) [卢德江、蒋庄德 2007 真空科学与技术学报 27 25]
[9] Rutkūnien , Grigonis A, R za A, Babonas J G, Jotautis A 2003 Physics and Chemistry of Solid State 4 407
[10] Samukawa S, Jinnai B, Oda F, Morimoto Y 2007 Jpn. J. Appl. Phys 46 L64
[11] Gou F, Gleeson M A, Kleyn A W 2007 Surf. Sci. 601 76
[12] Kolfschoten A W, Haring R A, Haring A, Vries A E 1984 J. Appl. Phys. 55 3813
[13] Agrawal A, Butera R E, Weaver J H 2007 Phys. Rev. Lett. 98 136104
[14] Materer N, Goodman R S, Leone S R 2000 J. Phys. Chem. B 104 3261
[15] Ohta H, Hamaguchi S 2001 J. Chem. Phys. 115 6679
[16] Hanson D E, Kress J D, Voter A F 1999 J. Chem. Phys. 110 5983
[17] Humbird D, Graves D B 2004 J. Appl. Phys. 96 791
[18] Barone, Robinson, Graves 1996 IEEE T. Plasma. Sci. 24 77
[19] Ohta H, Hamaguchi S 2001 J. Vac. Sci. Technol. A 19 2373
[20] Yan C, Lü H F, Zhang C, Zhang Q Y 2006 Acta Phys. Sin. 55 1351 (in Chinese) [严 超、吕海峰、张 超、张庆渝 2006 物理学报 55 1351]
[21] Jia Z M, Yang G Q, Chen Z N, Liu X H, Zhou S C 1994 Acta Phys. Sin. 43 1809 (in Chinese) [郏正明、杨根庆、程兆年、柳襄怀、邹世昌 1994 物理学报 43 1809]
[22] Dai Y B, Shen H S, Zhang Z M, He X C, Hu X J, Sun F H, Xin H W 2001 Acta Phys. Sin. 50 244 (in Chinese) [戴永兵、沈荷生、张志明、何贤昶、胡晓君、孙方宏、莘海维 2001 物理学报 50 244]
[23] Hanson D E, Voter A F, Kress J D 1997 J. Appl. Phys. 82 3552
[24] Gou F, Kleyn A W, Gleeson M A 2008 Int. Rev. Phys. Chem. 27 229
[25] Swope W C, Andersen H C, Berens P H, Wilson K R 1982 J. Chem. Phys. 76 637
[26] Humbird D, Graves D B 2004 J. Chem. Phys. 120 2405
[27] Abrams C F, Graves D B 1999 J. Appl. Phys. 86 5938
[28] Berendsen H J C, Postma J P M, Gunsteren W F, DiNola A, Haak J R 1984 J. Chem. Phys. 81 3684
[29] Herman I P, Donnelly V M, Cheng C C, Guinn K V 1996 Jpn. J. Appl. Phys. 35 2410
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