The molecular dynamics simulation is used to study the evolution of misfit dislocation networks at γ/γ' phase interfaces of Ni-based single crystal superalloy under shear loading. From the simulation we found that the three patterns of dislocation networks on the (100), (110) and (111) phase interfaces show different degrees and patterns of damage. The deformation and damage occur easier at a higher temperature. Under the same shear loading and temperature, the square dislocation network at (100) phase interface is the most stable.